Improvement of saturation magnetization of sputtered Fe/Al multilayer thin films using taguchi method supported by ANOVA, response surface methodology and regression analysis

Basit Öğe Kaydı
dc.authorid0000-0002-3050-1549en_US
dc.contributor.authorKöçkar, Hakan
dc.contributor.authorKaplan, Nadir
dc.contributor.authorKarpuz, Ali
dc.date.accessioned2023-09-19T08:21:49Z
dc.date.available2023-09-19T08:21:49Z
dc.date.issued2023en_US
dc.departmentKMÜ, Kamil Özdağ Fen Fakültesi, Fizik Bölümüen_US
dc.description.abstractTaguchi method has been conducted to improve the saturation magnetisation, Ms, of Fe/Al multilayer thin films deposited using a dual-target magnetron sputtering. The Ms values were obtained from the magnetic hysteresis loops. To evaluate the influence of deposition factors on Msby using the Taguchi method, L9 orthogonal array with three deposition factors (A - Fe deposition rate, B - Al deposition rate, and C - Fe layer thickness) was carried out with nine experiments at three levels. For the signalto-noise ratio of the "larger is the better", the improved Mshas been obtained at A3B2C3, where factor A is 0.12 nm/s, factor B is 0.03 nm/s, and factor C is 25 nm. At A3B2C3, a verification experiment was carried out with a 95% confidence level to confirm the prediction of 1597.6 emu/cm3, and in the experimental run, Ms; expwas found to be 1649.0 emu/cm3, which was an improvement from the highest initial run, i.e., Ms; ini = 1540.2 emu/cm3, among prescribed runs. Analysis of variance was imposed to obtain the F-ratio and contribution percentage of each deposition factor. Also, the interactions of the deposition factors were determined with response surface methodology. For the structural properties at the best factor combinations, X-ray diffraction experiments revealed that Fe/Al films at A3B2C3 were crystallised with the mixed phase of face-centred cubic and body-centred cubic structures. According to scanning electron microscope images, the film surface is almost uniformly shaped. Furthermore, the model of Mshas also been developed using regression analysis as a function of the deposition factors A, B, and C. Then, from the regression model, high statistical performance was obtained, with values of R2and R2(adj) being 100 and 100%, respectively. It is seen that the Taguchi method supported by response surface methodology, analysis of variance, and regression analysis turned out to be very successful in finding the factors with proper levels in order to improve Msof Fe/Al multilayer thin fims within the prescribed limit.en_US
dc.identifier.citationKöçkar, H., Kaplan, N., Karpuz, A. & Karaağaç, O. (2023). Improvement of saturation magnetization of sputtered fe/al multilayer thin films using taguchi method supported by anova response surface methodology and regression analysis. Acta Physica Polonica A, 143 (5); 381–388.en_US
dc.identifier.doi10.12693/APhysPolA.143.381
dc.identifier.endpage388en_US
dc.identifier.issn0587-4246
dc.identifier.issue5en_US
dc.identifier.scopus2-s2.0-85165131630
dc.identifier.scopusqualityQ3
dc.identifier.startpage381en_US
dc.identifier.urihttps://doi.org/10.12693/APhysPolA.143.381
dc.identifier.urihttps://hdl.handle.net/11492/7544
dc.identifier.volume143en_US
dc.identifier.wosWOS:001048682300006
dc.identifier.wosqualityQ4
dc.indekslendigikaynakWeb of Sceince
dc.indekslendigikaynakScopus
dc.institutionauthorKarpuz, Ali
dc.language.isoen
dc.publisherPolska Akademia Nauken_US
dc.relation.journalActa Physica Polonica Aen_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.subjectFe/Al Multilayer Thin Filmsen_US
dc.subjectRegression Analysisen_US
dc.subjectResponse Surface Methoden_US
dc.subjectTaguchi Methoden_US
dc.titleImprovement of saturation magnetization of sputtered Fe/Al multilayer thin films using taguchi method supported by ANOVA, response surface methodology and regression analysisen_US
dc.typeArticle

Dosyalar

Orijinal paket
Listeleniyor 1 - 1 / 1
Küçük Resim
İsim:
Kockar, Hakan.pdf
Boyut:
1.31 MB
Biçim:
Adobe Portable Document Format
Açıklama:
Tam Metin / Full Text
İndir
Lisans paketi
Listeleniyor 1 - 1 / 1
[ X ]
İsim:
license.txt
Boyut:
1.44 KB
Biçim:
Item-specific license agreed upon to submission
Açıklama:
İndir

Koleksiyon

Scopus İndeksli Yayınlar Koleksiyonu
Kamil Özdağ Fen Fakültesi, Fizik Bölümü,Makale Koleksiyonu
WoS İndeksli Yayınlar Koleksiyonu